MPI TS200 | 200 mm Manual Probe System For accurate and reliable DC/CV, RF and High Power measurements

Universal Use

• Designed for wide variety of applications such as RF and mmW, Device Characterization, Wafer Level Reliability, High Power, Failure Analysis, IC Engineering and MEMS

Ergonomic Design

• Unique puck controlled air bearing stage for quick single-handed operation
• Rigid platen accommodates up to 10 DC or 4 RF positioners
• Highly repeatable platen lift design with three discrete positions for contact, separation, and loading

Microscope Mount and Movement

• Stable bridge for high quality optics
• Linear Z lift for easy reconfiguration
• 25 x 25 mm air bearing or 50 x 50 mm 
  

linear XY movement

• Adjustable Platen Height
• Micrometer control for precise adjustment
• 20 mm range for various applications
  

Probe Platen

• Stable and rigid design
• Supports DC/CV and RF measurements
• Rectangular adjustments for RF positioners
• Designed for maximum thermal stability 
  

Unique Platen Lift

• Three discrete positions for contact, separation (300 µm) and safety loading (3 mm)
• Safety lock function at loading position
• “Auto Contact“ position with ±1 µm repeatability for consistent contact quality
  

RF Calibration

• 2 auxiliary chucks for calibration substrates
• Built-in ceramic for accurate calibration
• 1 µm flatness for consistent contact quality
  

Small Footprint

• Designed for bench top use
• Comes with vibration absorber base
• Low profile design for maximum usability

Upgradability

• Available with various chuck options and wide range of accessories such as DC/RF/mmW MicroPositioners, microscopes and EMI shielded DarkBox to support various application requirements