MPI TS300 | 300 mm Manual Probe System For accurate and reliable DC/CV and RF measurements

Universal Use

• Designed for wide variety of applications such as Device Characterization and Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering and MEMS

Ergonomic Design

• Unique puck controlled air bearing stage for quick single-handed operation
• Rigid platen accommodates up to 10 DC or 4 RF positioners
• Highly repeatable platen lift design with three discrete positions for contact, separation, and loading

Microscope Mount and Movement

• Stable bridge for high quality optics
• Linear Z lift for easy reconfiguration
• 25 x 25 mm air bearing or 150 x 150 mm linear XY movement
  

Probe Platen

• Stable and rigid design
• Supports DC/CV and RF measurements
• Rectangular adjustments for RF positioners
• Designed for maximum thermal stability
  

Unique Platen Lift

• Three discrete positions for contact, separation (300 µm) and safety loading 3 mm
• “Auto Contact“ position with ±1 µm repeatability for consistent contact quality
• Safety lock function at loading position
  

Adjustable Platen Height

• Micrometer control for precise adjustment
• 20 mm range for various applications
• Including platen heigth reference scale
  

RF Calibration

• 2 auxiliary chucks for calibration substrates
• Built-in ceramic for accurate calibration
• 1 µm flatness for consistent contact quality
  

Small Footprint

• Designed for bench top use
• Comes with vibration absorber base
• Low profile design for maximum usability

Microscope and Optics Options

• Various optics options available
• Stereo MPI ST45 or single tube MPI SZ10, MZ12 with up to 12x zoom and 95 mm working distance
• High Power microscopes FS70/PSM-1000
• HDMI cameras, monitor user interface without computer
  

Thermal Chuck Integration

• Seamless integration of the thermal controller touch screen panel provides most convenient operation
  

Modular Chucks

• Various non-thermal or thermal chucks
• Choice of triaxial or coaxial connection
• Wide range of temperature up to 300 °C
• Field upgradable for reduced cost of ownership
• Easy switch between center and small wafer size control
  

DC and RF Positioners

• Supports up to 4 RF and 10 DC positioners
• Wide range of positioners available
• Dedicated probe arms for DC/CV and RF measurements 
  

Chuck XY Stage Movement

• Unique puck controlled air bearing stage for quick single-handed operation
• 330 x 420 mm XY total stage movement
• 25 x 25 mm XY fine micrometer adjustment
• Resolution < 1.0 µm (0.04 mils) @ 500 µm/rev
• Extra wide Y-range for easy loading
• ±5° Theta fine adjustment
  

Front Mounted Vacuum Control

• Easy access
• Clearly marked

***Available Options***

• Vibration isolation platform
• Vacuum pump and air compressor unit
• Probe card holder
• Table with integrated rack for thermal controller, computer and keyboard push tray (Dual monitor stand option & Instrument shelf option

Upgradability

• Available with various chuck options and wide range of accessories such as DC/RF/ mmW MicroPositioners, Optics, microscopes and EMI shielded dark box to support various application requirements