MPI TS2000 Series | 200 mm Automated Probe Systems For reliable DC, RF and High Power Production Test Measurements

MPI TS2000 is a natural evolution of the world-wide and well established Probe System with dedicated designs addressing Advanced Semiconductor Test market requirements. The system is fully compatible with the all MPI system accessories and is designed primarily to address of Failure Analysis, Design Verification, IC engineering, Wafer Level Reliability as well as special requirements for MEMS, High Power, RF and mmW device testing.

Available for ambient and/or hot only temperature operation modes the TS2000 is fast with speed up to 10 Dies/second (depends on the final configuration), which makes it an ideal choice for pre-production electrical tests on discrete RF devices, as example.
FEATURES / BENEFITS
Designed for wide variety of On-Wafer Production Applications

• DC-IV / DC-CV / Pulsed-IV applications
• RF applications up to 67 GHz & 4-port setup
• High Power production application up to 10 kV / 600 A
• IC Design validation from ambient to 300 °C

Production Reliability

• Designed for 24/7 production reliability
• Integrated passive vibration isolation table
• Optional active vibration isolation base
• Ready for temperature ambient to 300 °C

Ergonomic Design and Options

• Designed with easy single wafer front loading
• Large Probe Platen supporting up to 12x DC or 4x DC + 4x RF MicroPositioners or standard 4.5” probe card holder
• Available with various chuck options and wide range of accessories such as 4.5" probe card adaptor, DC/RF MicroPositioners, microscopes to support various application requirements

Integrated DarkBox (TS2000-D/-DP) 

• Provides test environment for light-sensitive measurements
• Opening mechanism for convenient operation
• Interlock for safety operation (TS2000-DP)
• Standardized side panels for integration of 
  

Parametric or high-power analyzers

• Easy removable service back plane
• Integrated LED illumination
  

MicroPositioners and High Power Probes

• Supports up to 4 RF and 10 DC MicroPositioner
• Wide range of MicroPositioners available
• Dedicated Coax, Triax and Kelvin probe arms
• High Voltage (3kV TRX, 5kV or 10kV COAX) and High Current (up to 100A) Probes
  

Probe Platen 

• Large, stable and rigid design
• Rectangular adjustments for RF positioners
• Integrated air-cooling for maximum thermal stability
  

Thermal Control

• Thermal chucks, can be operated by using the fully integrated touchscreen display
• Convenient location in front of the operator for fast operation and immediate feedback
  

Modular Chucks 

• Various non-thermal or thermal chucks
• Choice of Triaxial or Coaxial connection
• Wide range of temperature from 20 °C up to 300 °C
• Field upgradable for reduced cost of ownership

Microscope and Optics Options

• Stable microscope bridge mount
• 50 x 50 mm manual or programmable
• Various optics available
• Single tube MPI SZ10 or MZ12 w. up to 12x zoom
• High Power microscopes FS70/PSM-1000
• 2MP SENTIO® controlled camera available
  

Software Suite SENTIO®

• Simple and intuitive operation by revolutionary,multi-touch software control saves significant training time
• Scroll, Zoom, Move commands mimic modern smart mobile devices and allows to become an expert in just minutes
• Switching between the active application and the rest of the APPs is just matter of a simple finger sweep
• MPI RF calibration software program QAlibria® is fully integrated with SENTIO® – for ease of use by following a single operational concept methodology
• GPIB, TCP/IP interface for remote control
  

Integrated Hardware Control Panel

• Provides faster, safer and convenient system control and test operation
• Keyboard and mouse are strategically located to control the software
  

Integrated Vibration Isolation Table

• Incorporates a high performance vibration isolation platform (option)
• Optimized system footprint
• Optional instrument shelf reduces cable lengths and increases measurement dynamic and directivity