MPI TS3000 Series | 300 mm Automated Probe Systems The Dedicated Systems for Product Engineering with IceFreeEnvironment

The TS3000 from MPI is an automated 300 mm probe system, specifically designed for Product Engineering, Failure Analysis, Design Validation, Wafer Level Reliabilityand RF & mmW applications.

The TS3000 feature set provides:

• Maximum on temperature range -60…300°C
• Maximum on flexibility
• Minimum cable distance to functional testers with a design specific cable interface for better measurement directivity
• Minimum platen-to-chuck height for optimal mmW & internal node probing
• Minimum system footprint which integrates the thermal system’s chiller “inside”

FEATURES / BENEFITS
Designed for Variety of On-Wafer Applications

• DC-IV / DC-CV / Pulsed-IV applications
• RF, mmW, load-pull applications & 4-port setup
• IC Design Validation, Failure Analysis in wide temperature range from -60 to 300 °C
• Wafer Level Reliability

Extended Flexibility

• MPI IceFreeEnvironment™ for using MicroPositioners and probe cards simultaneously, even at negative temperature
• Programmable microscope movements for more automation and ease of use
• The shortest cable interface to IC tester
• Minimize the platen-to-chuck distance for mmW & probing with active probes
• Supports film-frame probing

Ergonomic Design and Footprint

• Easy wafer or single DUT loading from the front
• Integrated active vibration isolation
• Completely integrated prober control for faster, safer and convenient system and test operation
• The Safety Test Management (STM™) with automated dew point control
• Reduced footprint due to smart chiller space arrangement
• Instrument shelf option for shorter cables and higher measurement dynamic

Microscope and Optics Options

• Stable microscope bridge mount with 50 x 50 x 140 mmprogrammable movement
• Various optics options available such as MPI AMZ12 w. upto 12x optical zoom or MPI iMAG® - the digital microscope
• High Power microscopes FS70/PSM-1000
  

MicroPositioners and High Power Probes

• Supports up to 4 RF and 10 DC MicroPositioner
• Wide range of MicroPositioners available, including largearea for mmW applications
• Dedicated Coax, Triax and Kelvin probe arms
  

Probe Platen

• Stable and rigid design
• Rectangular adjustments for RF positioners
• Integrated air-cooling for maximum thermal stability IceFreeEnvironment™
• For using MicroPositioners and probe cards simultaneously,even at negative temperature
• Wide range of triaxial or coaxial thermal chucks intemperature range from -60°C up to 300 °C
• Field upgradable for reduced cost of ownership

Integrated Vibration Isolation Table

• Incorporates a high performance vibration isolation platform
• Optimal working height for ergonomic daily operation

Software Suite SENTIO®

• Simple and intuitive operation by revolutionary, multi-touch software control saves significant training time
• Scroll, Zoom, Move commands mimic modern smart mobile devices and allows to become an expert in just minutes
• Switching between the active application and the rest of the APPs is just matter of a simple finger sweep
• MPI RF calibration software program QAlibria® is fully integrated with SENTIO® – for ease of use by following a single operational conceptmethodology
•  GPIB, TCP/IP interface for remote control
  

RF Calibration

• 2 auxiliary chucks for calibration substrates
• Built-in ceramic for accurate calibration up to THz
• 1 μm flatness for consistent contact quality
  

Thermal Chuck Integration

• Thermal chuck can be operated by using the fully integrated touchscreen
  display
•  Convenient location in front of the operator for fast operation and immediate feedback
• Reduced footprint by chiller space integration
  

Integrated Hardware Control Panel

• Provide faster, safer and convenient system control and test operation
• Keyboard and mouse are strategically located to control the software or the measurement instruments

***Available Options***

• Optional instrument shelf reduces cable lengths and increases measurementdynamic and directivity
• Dark Box