MPI TS3000-SE | 300 mm Automated Probe System For accurate and reliable IV, CV, pulsed-IV, 1/f and RF Measurements

The TS3000-SE is the consequent further development of the TS3000 probe system equipped with MPI ShielDEnvironment™ for ultra-low noise, extremely accurate and highly reliable DC/CV, 1/f, RTS and RF measurements, addressing primarily the needs of the Device Characterization, Wafer Level Reliability and RF & mmW applications.

The exclusive, actively cooled probe platen design provides maximal stability over the wide temperature range from -60° to 300°C and is making the TS3000-SE probe system an excellent choice for testing devices under different thermal conditions.

FEATURES / BENEFITS
Designed for Wide Variety of On-Wafer Measurement Applications

• Device Modeling - DC-IV, DC-CV, Pulse-IV, ESD, 1/f
• RF and mmW - RF Setup from 26 GHz to 110 GHz & beyond
• Wafer Level Reliability - for accurate stress- and measure conditions
• Drivers for leading test executive software suits

MPI ShielDEnvironment™ for Accurate Measurements

• Advanced EMI / RFI / Light-tight Shielding for best 1/f noise test results
• Ultra-low noise IV measurements down to fA level
• Programmable microscope movements for test automation and ease of use
• Wide temperature range -60 °C to 300 °C with unique configuration flexibility 

Ergonomic Design and Options

• Easy wafer or single DUT loading from the front
• Integrated active vibration isolation
• Completely integrated prober control for faster, safer and convenient system and test operation
• The Safety Test Management (STM™) with automated dew point control
• Reduced footprint due to smart integration of the chiller • Instrument shelf option for shorter RF cables providing the highest measurement dynamic

Microscope and Optics Options

• Stable microscope bridge mount with 50 x 50 x 140 mmprogrammable movement
• Various optics options available such as MPI AMZ12 w. upto 12x optical zoom or MPI iMAG® - the digital microscope
  

MicroPositioners and High Power Probes

• Supports up to 4 RF and 8 DC MicroPositioners
• Wide range of MicroPositioners available, including large area for mmW applications
• Dedicated Coax, Triax and Kelvin probe arms
  

Probe Platen

• Stable and rigid design
• Rectangular adjustments for RF positioners
• Integrated air-cooling for maximum thermal stability ShielDEnvironment™
• Advanced EMI / RFI / Light-tight shielding for the best 1/f noise test results fA low-leakage capabilities
  

Integrated Vibration Isolation Table

• Incorporates a high performance vibration isolation platform
• Optimal working height for ergonomic daily operation

Software Suite SENTIO®

• Simple and intuitive system operation by revolutionary multi-touchcontrol
• Scroll, Zoom, Move commands mimic modern smart mobile devicesmaking everyone the operation expert just in minutes
• Switching between applications is just a matter of a finger swipe
• Integrated workflow with MPI RF calibration software QAlibria® provides unparalleled user experience
• GPIB, TCP/IP interface for remote control
  

RF Calibration

• Integrated two auxiliary chucks for RF calibration substrates
• Built-in ceramic for accurate calibration up to THz frequencies
• 1 μm flatness for consistent contact across the wafer
• Thermal Chuck Integration
• Wide temperature range -60 °C to 300 °C with unique configuration capabilities
• Convenient location of the control pannel for fast and easy interaction with the system
• Reduced footprint by smart integration of the chiller space
  

Integrated Hardware Control Panel

• Provide faster, safer and more convenient system operation and control
• Keyboard and the mouse are at the system control panel for a singlepoint operation with the system and controlling test instrumentation

***Available Options***

• Optional instrument shelf reduces the length of RF cables providing the highest measurement dynamic range and improves system directivity.